The I/O communication with 2Dinese is extremely simple. The user will need to create text files in the following three format types:
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I. The "Initial Structure Data Format"
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The structure (see Definitions) is defined as a sequence of regions. Each region is described in the following way:
a) Begins with a leading line containing the number of points, which define the region.
b) After that there follow the coordinates of the points defining the region in a clockwise manner. The number of the coordinate pairs has to be exactly equal to the number specified in the leading line.
c) Each point (coordinate pair) is defined on a separate line, the first coordinate being the horizontal, followed by the vertical coordinate.
d) The two numbers are in floating point format and are separated by a space or a tab.
e) There must not be double points, that is points, the coordinates of which are identical.
f) The space after the data on a given line is for user's own use.
g) Each line is terminated by a new line, or line feed, or carriage return.
h) The boundary of a region cannot be self-intersecting.
i) The axes of the Cartesian coordinate system conicide with the vertical and horizontal directions on the screen. The positive directions are "Up" and "Right".
- The structure consists of a sequence of such regions.
- The structure is read until the "End of File" message is encountered.
- The regions are defined in no particular order.
- There cannot be void spaces between any of the regions.
- The structure must consist of at least one region.
- Remember that the left, right and bottom boundaries of the structure are flat!
See the file "InitialStructure" for an example.
N.B. Internally the structure is considered infinite in the lateral directions (see Definitions), but numerically it is limited. These limits are the left and the right hand side boundaries of the structure. In other words, the numerical lateral dimensions of the structure, as defined by the user are pre-determined by the above definition of the initial structure and CANNOT BE ALTERED AFTER THAT.
In the present version of 2Dinese this format is only used for creating files containing an angular dependence of the etch rate for Directional Etch processes. The data should lie in the angular interval (0,90) degrees. Too many data points may result in an execution penalty. On the other hand if their number is too small then the interpolation may be too crude. The format is the following:
1. Each data point consists of an angle in degrees and an etch rate (in units selected in the Preferences for that particular process). The two numbers are separated by a space.
2. There is only one data point on a line. The rest of the line is for user's own use.
3. The line is terminated by Carriage return, New line or Line feed.
4. The file is read until the "End of file" message is encountered.
5. All values are in floating point format.
6. The data points need not be in any particular order.
7. The file MUST be closed when read by the program.
8. The etch rate at 90 degrees must be zero.
9. The etch rate at 0 degrees (normal incidence) must always be specified.
(for an example see the "Directional.DataFile" file)
This format is used for creating files containing an angular dependence of the etch/deposition rate for Anisotropic Etch/Deposition processes. The data should lie in the angular range 0,360 degrees. It is highly recommended that the points 0,90,180 and 270 degrees are always defined and that there are a sufficient number of data points in the intervals between them.
The ability to define angular data for the whole interval 0,360 degrees means that the user is able to simulate totally anisotropic processes, i.e. such which do not exhibit any symmetry.
The format is the following:
1. Each data point consists of an angle in degrees and an etch/deposition rate (in units selected in the Preferences for that particular process). The two numbers are separated by a space.
2. There is only one data point on a line. The rest of the line is for user's own use.
3. The line is terminated by Carriage return, New line or Line feed.
4. The file is read until the "End of file" message is encountered.
5. All values are in floating point format.
6. The data points need not be in any particular order.
7. The file MUST be closed when read by the program.
(for an example see the "Anisotropic.DataFile" file)
REMARK: All input files are in plain text format and can be created by any wordprocessor. For user's convenience and consistency with the Macintosh User Interface, text files, created by 2Dinese bear the "ttxt" signature, that is a TeachText document.
Copyright 1996 I.V.Katardjiev. All rights reserved.
